Dynamic modeling of a silicon bulk-micromachined microaccelerometer

Abstract

In this work, we describe dynamic modeling and simulation of a capacitive silicon bulk-micromachined microaccelerometer. The modeling of the mechanical part is done through equivalent stiffness and equivalent damping coeffi- cients analyses using the Euler-Bernoulli equation and the Modified Reynolds equation, respectively. A dynamic model is ob- tained taking into account the electric force influence between the electrodes. Nonlinear and linear models are compared. The an- alytical results are compared with numerical results obtained by computational method in both time-domain and frequency- domain and it show a quite good agreement.